Local disposal of process exhaust from integrated circuit workshop

The toxic and harmful process industrial waste gas is generated from the product manufacturing process of integrated circuit workshop. Due to the complicated manufacturing process and the various types of gases and chemicals, the harmful ingredients of process air exhaust can not be effectively removed only by central exhaust treatment equipment. With an engineering example, presents the function, category, principle and selection of local treatment equipments for the process exhaust from integrated circuit workshop. Sampling analysis shows that the equipments run stable, and the removal efficiencies are higher than 90%.